durusmail: mems-talk: Are there any 'safe' (non-hf) isotropic etches?
Are there any 'safe' (non-hf) isotropic etches?
2013-09-20
Nathan McCorkle
2013-09-20
David Casale
2013-09-20
Bill Moffat
2013-09-20
Nathan McCorkle
2013-09-24
Mike Whitson
2013-09-24
Mike Whitson
2013-09-23
André Bödecker
2013-09-24
Dave
2013-09-25
Mike Whitson
2013-09-25
Kirt Williams
2013-09-27
Nathan McCorkle
Are there any 'safe' (non-hf) isotropic etches?
Nathan McCorkle
2013-09-27
Thanks for all the great replies!

I definitely won't play with HF without the right PPE and a fresh tube
of calcium gluconate.

I think the next step is to see if the $20/hr lab bench space (where
HF is approved) is cheaper than DRIE without passivation... I only
need 1 micron depth to start, but I have no idea of DRIE cost/min or
hour.

On Tue, Sep 24, 2013 at 9:28 PM, Kirt Williams
 wrote:
> BHF mixed with most acids, especially strong acids (meaning that they fully
> dissociate into H+ and the anion), will form some HF (that is, the compound
> [responsible for etching], not dissociated into H+ and F-). As noted in one
> of the papers, "the Trilogy etch" forms HF from the ammonium fluoride and
> nitric acid. Use the appropriate safety precautions for HF.
>    --Kirt Williams
>
> -----Original Message-----
> From: mems-talk-bounces+kirt_williams=sbcglobal.net@memsnet.org
> [mailto:mems-talk-bounces+kirt_williams=sbcglobal.net@memsnet.org] On Behalf
> Of Dave
> Sent: Tuesday, September 24, 2013 9:41 AM
> To: mems-talk@memsnet.org
> Subject: Re: [mems-talk] Are there any 'safe' (non-hf) isotropic etches?
>
> Are you sure on the NH4F safety? My understanding is that this simply
> dissociates into HF once it is combined with water.
>
> Whenever I use etchants with NH4F or ammonium biflouride I treat them like
> HF.
>
> Dave
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--
-Nathan
_______________________________________________
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