durusmail: mems-talk: TMAH reaction with copper
TMAH reaction with copper
TMAH reaction with copper
André Bödecker
2013-10-01
Hi Ricky,



copper has a chemical affinity to form a bond with the free electron pair of
nitrogen in nitrogen-containing compounds like ammonia ( by forming this:
[Cu(NH3)4]2+) or its derivative TMAH. I’m not sure if  sterically possible
for TMAH to form a fourfold tetramethyl ammonium complex with copper or if
it’s only a twofold. There is always a slight oxidation of copper under the
presence of oxygen. If there is also such a nitrogen-compound, you will have
a reaction as described above.





Best regars/Mit freundlichem Gruß



André Bödecker



Institut für Mikrosensoren, -aktoren und -systeme

Universität Bremen Fachbereich 1

Otto-Hahn-Allee1

28359 Bremen

Tel: 0421 218 62596



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