durusmail: mems-talk: SiO2/Si3N4 microcantilever fabrication
SiO2/Si3N4 microcantilever fabrication
2013-10-24
SiO2/Si3N4 microcantilever fabrication
Ned Flanders
2013-10-28
On Thu, Oct 24, 2013 at 8:02 AM, girija moona wrote:

> hello everyone,
> I plan to fabricate Sio2 or Si3N4 microcantilevers for low force sensing.
> looking forward for help in this regard. I would need all the fabrictaion
> steps in detail.


Seriously? I know some students are lazy, but you turned the volume to 11.
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