Dear MEMS researchers,


do you know of a wet etchant that would remove ALD TiO2 from silicon? Some
of my colleagues told me that they don't know of anything suitable for ALD
films of TiO2 - only TiO2 nanoparticles. Incredulous, I hit google, but
came up with nothing - apparently, continuous films of TiO2 are quite a
challenge to etch with wet etchants.

Would any of you have a recipe that was tested as working with ALD TiO2?



Cheers!

--
Gianmario Scotti

Researcher
Aalto University, Dept. of Materials Science and Engineering
http://materials.aalto.fi/en/

Micronova, Tietotie 3
02150 Espoo
Finland
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