I Am not sure how much the thickness you wanna etch. How about starting
with conventional titanium etchant? Of course HF based etchant is dangerous
but it surely have selectivity over Si.
2013. 11. 1. 오전 8:22에 "Gianmario Scotti" 님이 작성:

> Dear MEMS researchers,
>
>
> do you know of a wet etchant that would remove ALD TiO2 from silicon? Some
> of my colleagues told me that they don't know of anything suitable for ALD
> films of TiO2 - only TiO2 nanoparticles. Incredulous, I hit google, but
> came up with nothing - apparently, continuous films of TiO2 are quite a
> challenge to etch with wet etchants.
>
> Would any of you have a recipe that was tested as working with ALD TiO2?
>
>
>
> Cheers!
>
> --
> Gianmario Scotti
>
> Researcher
> Aalto University, Dept. of Materials Science and Engineering
> http://materials.aalto.fi/en/
>
> Micronova, Tietotie 3
> 02150 Espoo
> Finland
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