durusmail: mems-talk: Ansys for MEMS electrostatic calculations
Ansys for MEMS electrostatic calculations
2013-10-31
Youmin Wang
2013-11-04
Daniel Shaw
2013-11-05
Youmin Wang (2 parts)
2013-11-05
Youmin Wang (2 parts)
2013-11-11
Daniel Shaw (2 parts)
2013-11-13
Youmin Wang (2 parts)
2013-11-19
Daniel Shaw (2 parts)
2014-01-16
Daniel Shaw (2 parts)
Ansys for MEMS electrostatic calculations
Youmin Wang
2013-11-05
Hi Friends,

Actually, I want to state a little bit more on the meshing issue of my
current study using Solid226. The problem I have is the Ansys program
simply crashes when I try to solve. I searched online and somebody says the
14.5 versions are not really stable. But I think it might be the problem
with the meshing. I wonder whether Daniel or anyone else has come into this
problem before.

Thanks.


On Mon, Nov 4, 2013 at 11:54 AM, Youmin Wang wrote:

> Hi Daniel,
>
>
> Thank you for you kind help!
>
> After investigations done so far, I recognized that Trans126 element might
> not be a good choice to be used in my tilting mirror applications. Though
> the Ansys help manual indicated something as below:
>
> [image: Inline image 1]
>
> As you can see, the above figure is using Trans126 elements, though I
> think it is a simplified model. I heard that Trans126 is good for
> attraction, while difficult to perform the leaving electrodes. Beyond that.
> I think my micromirror has more complicated geometry than the parallel
> plates, I don't know this parallel-plate simplification would be a good
> choice for it.
>
> As for now, I am considering to proceed with the Solid226 option, which is
> exactly what you have suggested. I am trying to mesh the air gap between
> the movable mirror and the fixed electrodes using Solid226 elements, while
> leaving the other parts using Solid45. The electroelastic and structural
> elements are joined through nodal connectivity at the interface between
> them. I am still working on this direction right now, when the geometry
> becomes more complicated, seems it get more difficult to converge, I have
> many small parts to trim, such as the meshing and boundary conditions...
>
> Another option seems to be multi-field solver, which up-to-now I have not
> acquired too much reference materials and did not dive in too deep yet.
>
> Again, thank you very much for your help and suggestions! I am really
> grateful to you. If you could provide more insight, that would be really
> great.
>
>
> On Fri, Nov 1, 2013 at 11:22 AM, Daniel Shaw wrote:
>
>> Hi Youmin:
>>
>>
>>
>> To perform an electrostatic-structural simulation using Mechanical APDL
>> (aka “classic ANSYS”), you can use either the 22x coupled-field elements,
>> the multi-field solver (MFS), or the electro-mechanical transducer element
>> (TRANS126).  You could also use the reduced order electrostatic-structural
>> element (ROM144).  The 22x elements and the MFS use a sequential coupling
>> approach.  TRANS126 and ROM144 use a matrix coupling approach.
>>
>>
>>
>> If possible, I recommend using TRANS126.  It is the simplest and most
>> robust approach.  With the 22x elements and the MFS, you might have
>> meshing
>> issues at pull-down.  ROM144 can be complicated to implement.  If fringing
>> effects are significant, TRANS126 might be difficult to accurately
>> implement.  In that case, you need to use one of the other methods.
>>
>>
>>
>> Regards,
>>
>>
>>
>> Daniel Shaw
>>
>> ANSYS, Inc.
>>
>>
>>
>> On Wed, Oct 30, 2013 at 9:50 PM, Youmin Wang > >wrote:
>>
>> > Dear Friends,
>> >
>> > I am starting to use Ansys for the modeling of MEMS micromirror
>> > static/dynamic analysis. There have been many previous work in this
>> field,
>> > but according to my observations, 3 key technologies were basically used
>> > for MEMS electromechanical coupling, which are 1. using Coupled Field
>> > Element (SOLID226); 2. Multi-field solver; and 3. Trans126.
>> >
>> > Seems for method #1 I have to use air to enclose the whole device if
>> fringe
>> > electric field needs to be considered, but in "Gyimesi, Miklos, Ilya
>> > Avdeev, and Dale Ostergaard. "Finite-element simulation of
>> > micro-electromechanical systems (MEMS) by strongly coupled
>> > electromechanical transducers." Magnetics, IEEE Transactions on 40.2
>> > (2004): 557-560." it says in large deformation bending electrode
>> problem,
>> > Trans126 might not be suitable.
>> >
>> > Do you guys have any previous experience on this selection issue?
>> Besides,
>> > seems Trans126 also requires the pre-stress definition, which I am still
>> > struggling to find out where to apply...
>> > _______________________________________________
>> > Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> > provider of MEMS and Nanotechnology design and fabrication services.
>> > Visit us at http://www.mems-exchange.org
>> >
>> > Want to advertise to this community?  See http://www.memsnet.org
>> >
>> > To unsubscribe:
>> > http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>> >
>> _______________________________________________
>> Hosted by the MEMS and Nanotechnology Exchange, the country's leading
>> provider of MEMS and Nanotechnology design and fabrication services.
>> Visit us at http://www.mems-exchange.org
>>
>> Want to advertise to this community?  See http://www.memsnet.org
>>
>> To unsubscribe:
>> http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>>
>
>

‰PNG


IHDR˜$‹ÑAZ IDATxíÝ
|ÕÝÿñ!@ÂÅ@@
€‚¶HPTPP±ˆˆŠ­}¼Ñj[ô±ô¥Å՗>­—þՊ­¶ZQÛ¢¢•kED1«&Q¹   ˆˆ @@.
Â~'κ›ìnv73»³»Ÿy½x²;;sæÌ{¦O¿=3çœFG¬EX@@pH
ár(@@#@ÀäF@@pT€€é('
!€ €0¹@@
 `:ÊIa € €Lî@@G˜ŽrR € €“{@@ÀQ¦£œ† €
@Àä
@@pT€€é('
!€ €0¹@@
 `:ÊIa € €Lî@@G˜ŽrR € €“{@@ÀQ¦£œ† €
@Àä
@@pT€€é('
!€ €0¹@@
 `:ÊIa € €Lî@@G˜ŽrR € €“{@@ÀQ¦£œ† €
@Àä
@@pT€€é('
!€ €0¹@@
 `:ÊIa € €Lî@@G˜ŽrR € €“{@@ÀQ¦£œ† €
@Àä
@@pT€€é('
!€ ›ÀW[ÊåÅÉäkfJYÙ±Â^xD Ó#õ  €¤@yù>yãõ2ëßZY³j—ïü‹Wnüüξï|@ Ù
±–d«4õE@ Y4T–|ô¹,˜÷‰¬\±ÕwcÆõ”Ýä÷/1ëžyn’de5õýÎ’I€ÌdºZÔ@ )B
ʧu‹/9Yútñ
Éq—íÇyOJK6É©º'åùRi˜Ü €¸
.TŽ<¿·ô;^rs[Ô9òà!y&`½»€YG‡É"@ÀL–+E=@#àE¦¯
uBHÊʃæq¶¶8j(´}ü
®¥ÒÞ.ØßË'ü@ؼ«9ôÌÞÁ6a
ž `zúòP9@/
„
•Úò¨á0ÔãïHÏE÷×E;0#Uc;/        0½t5¨
 €€gÂ
Êaçô}wRo;±è»™ÃGt•E
7ŠŽéT¹Nԍ2ˆD€€‰Û €¤¥@{R€€éÉËB¥@T T¨
pZy~oë½ÊîIÿø;Ò+Íԑ‘J±˜^¸
Ô@À'P_¨ÔÇÅÚ¢—N‹š|óÍ^sÊL
™NW>yϕ€™¼×Žš#€)#PYyPŠÞ]Wçñ·ÝR™®¡2Ø+Gçf™–Ýt
Ù)s³§É‰0ÓäBsš €€×4T––l²‚å™=kµ¯z„ʺ³‰ïÆàCR        0“êrQY@ ¹B
ʼ^GË
åËiƒz¤åãï`-•„Êä¾×Ó½öÌt¿8@Àep¡rØ9=DgªÑÁÄÓi±Mýg•,Z¸Ñwê„J
’\€€™äê#€^°TíÇßÚR™î¡²¶   ¡Ò‹w0uj¨³¡‚ì
à(+ûBŠWnùs×Èö¯+ÍzBeÝ÷Lm“açä§Ý+¾›
)-@ÀLéËËÉ!€î

•mÛeÉäOMëÇßµ[*íP™Ž¯¸r¯     0½vE¨ ¡BåÄ«
¤ÿ€n’Ÿß9        ι*òJ€s–””ÌÔ¸Žœ
ມ2˜PèÁ7ü˜þ|FøjK¹,_¶Ffý³Ô÷N¥>þ¦¥2pìN
Ü6|A@˜Ü €v¨Ô)  ׬Úe~#T†î¨Ã;•·_0Ln@
*•e̸žR8°›ô-è"YYMÓF*Ôãï;4•sÇõKËÎKisñ9QG˜Ž0R
|„ʺ×콕ëêL]©¿Ïè×Zz<;CzüøZÉUXwGÖ €@€3€ƒ/ €@j
”—ðÏý×÷ø[Ï8][*õ܃u^ªýNåuëdÛ3_éæ, 3$6A’YÀ•
æ}"+Wlõ
¡2p@xû=Ó#û¦Ýԕ¾›‚8$@Àt’b@/       „
•ö´„
»§Õ;•zm‚µTÚ¡2
ÇîôÒýJ]RO€€™zה3B4¨/Tô;>í¦%$T¦é8í„
0~    ¨ »€ÝÛùå?
xüm·T*kæC§¥2ö{Œ=ˆE€€‹û €  °Ceí¹® •Áß©äñwoV¶Ì´½ôœ8$“@¨Pi÷v
vN>¿­
JKe2ÝÕÔ5•˜©|u97HjúBe:Î Ã;•I}KSù4 `¦ÑÅæT@ 9B
ö=ìœ
i9ƒ
¡29î[j‰€¿Ó_ƒÏ €@‚‚
(ûñw:¶T›eˆÇß   º99,10c@c@À       `¡ÒQé8Ø7¡Ò‰»Š2ð†ÓׁZ €@š„
•éØÛ9X¨Ô[!gJ“ÿ(pš).@ÀLñ
Ìé!€@╁׀PèÁ7RQ€€™ŠW•sB„

QöãoZ*wù®-•>
> R̔ºœœ
$R X¨ÔúL¼ª@•„ÊDޛ
x
0ã-Îñ@ ¥B
Êtm™Ã#¥noNƃS§þFrrrdʔ_IvvvЮY³Fžzê¯Ò§Oo™4iRÐmÜ^IÀt[˜ò@
åQ—@¾!à¦@—.åïŸ)C‡•Áƒ=Ô믿.K–¼%Ɲ
ô÷x¬$`ÆC™c €@Ò
”—ï“’>—ó>‘•+¶ú·–ʵ²f¿}7pY`ðàÁ&`>ýôÓAfEE
ù]«Ñ¿—kºxfh~A4 TÞê±âµòÚ+e„Ê@¾!7“O>Y

úJII©lÞ¼Y:uêpìÕ«W›ï“&])­[·ø-ž_˜ñÔæX àyP¡rÀi
däù½¥ ßñ’›ÛÂóçáTCy¤kË­S®”ƒ@Cƍ»ÄÌŋ×yÇò±ÇþdŠÖ–ÎD.ÌDêslð„@¨E¨
|
Àö(
Ø]²²šzâÚQ       ÒQÀ~ô={ö+sçΝ&xj
§¶t&r!`&RŸc#€@Â*+JiÉ&YôŸU²háF_=ìEKe
Iºzøn> àA}ô}æ™CMGžåËßñ½‹Y\\lj{Þyç%¼Ȫ_*€ñ°CeÑ»dö¬š÷”ôØé¢h¹×Çqp^`üøË
MÀüðÃ|sÖ¬́4|&z!`&ú
p|pU T¨Ìëu´
;§‡

’'ÇvÌuµ^*œP饫A]ˆ]@wìx¬é1>~üxÙ¾}»y<®á2Xç

³¬ìciÙ²
tíÚUòòòb?x{0#@bH.Beàõ"Tzð
T3æ"yì±ÇMKæÞ½{Ìii˦ÿ¢ÃÝyç]fÿõDï¼óŽƒµûoËgf,j샞(+ûB–,^ðø›–Êà
uÒí
SOÞ°T

Œ5ÊÌùóç›ÖKmѬݹ硇
6áR;þØïf>ûì³fÏû￯µ¾;3¸
k@ I4T¯Ü ó箑í_WšZ* •IrûRM$ ÂGþ‘¼úê¿M9Ç
(O[/íß4HڏÎ
8UƎ
gB¦njÊɀ¢üBÀŒŒÍ@ ñÁBeÛvY2ñª9chO9áÄö‰¯dœj ¯½»®Î
CéÚq)Nì
Ï蔑vˆ
=zt@½¾øâ
ó][/íp©+tpvmíܲå+!`ñÒM \¨ì? ›äçwN’Pï˜*ÓæàDð
è|äEE+|ßý?tîÜYž}öiÛ¶­ÿj3†ËP
‚6Žñ
-˜1±¸/°þ³m²ô­Õ¿í–JBe¿¾pù„¤Ý
Cîß}
äÐGßµ{‹koò©ScN®°°Ðµ“$`ºFKÁ
‹ÀW[Êeù²5òÆëk}ó]*ÇíL×wLc¹ŸØjt–Ÿ3žð=NŸ:õ×rñÅc\ã!`ºFKÁ
©@°P©ûê|×gžÝ‹Çߖ¡2Ò»‰í@ ¶€Îöó‡?üÁ¼s©Åÿç~Z§e³ö>
ýNÀl¨ û#€@LáBeáÀnÒ· KÚÌw
êJBeL·;!€€Ÿ€†Ë›nºÙ¬™>ý.9÷Üsý~uï#Ó=[JFZ„ÊïA•ß[ð   ÜÐÇâv¸|é¥Y¦÷¸;Gª[*³®
k@ÀAP³ÈèãoZ*k i©tð†£(ð      lÚ´É|®™RòYßzÿ“&Mt%x0ý•ùŒŽ„
•§žÚ^F\p’œ68Çßi:º#7
 €@Dë×o0ÛéDöX™µw¼ä’±µW9ò€é#
 €@¨PiÍ(‡ÈÃw-‘SÿÝJ
óŸ&p`Ý:©\õ©
Z»Nª¿Ý-•s^ómV9çß²Éú§Kf~_ÉìÚUšôì%M»u“fyy’™›ëÛ6ÒÚKÜ͞âáêAÀ
§Ão V ¾Pé?ßµ†.‘%²tÑ:¹èR÷Æ^
[a—´ƒöo%¾#ñøÛGÁÒR ¢´T*ŠŠdÿ«³¥zëÖ;H¬´¾
,~O*ËJ¨nÛbìXi1xHLa³ö1ÜþNÀt[˜òH1P­svK¥¨ô?õ¬¬¦2ò’ÇF IB
Jm‹f™þO0ó]k õdnÅ
*Óu0ø$¹
©&qØgµV–ÿîn_keó+®”ÇK¶,£Y2²²M€Ô™cJÿЪÖõŸÍÜk®­7¬Fs\§¶%`:%I9¤˜@¸P9ìœ
2xHž
e+dŸ‚šùÂ?,ޜt“P™b78§ƒ€Ã‡¶l‘
ø½iiÔ¢µµò(ë‘v,ïN«šÎVgŸmþiˆÝ=ãq2¿²‚f«›o‘œ‹F‹nã•
€é•+A=h€À'¥ŸË  =ŽmpÏl7B¥ÿiécò!#Ž—e
?—]åûäèÜþ?{î3¡Òs—„
!àI=Ö#ìò©·˜ºÅ£U±
5‡¸þ³[K÷<ð{9°²HÚüï-žiÍ$`zòV¥RD'0wö²yãbùÍïF[­Š­£ÛÙÚÚRþSºçåHÏ
­å¸ãŽ²‚`sSfÉ×KùŽ¶
³
ƒO0³ì£Ïeș½£®«Û;ØþïTòøÛmuÊG yv>ù¤ì}âqóŽeΔ›M
c¼ÎFCfö¬eçã3dÿó3eÛÚ5’ûÛÛMøŒW
B
‡€J†õ$™ÀúËåÚ1OË
ӆʈQ?¬·öÁ‚”¾S9hPÙcµ.Îÿ秲¥ì› åä´i&#Æö–qGÝjšßïxSæ¢yŸz&`³
T½ô¬DïôÈ¯o½Õ<×
ÞÇÜsoBZõ±xÛ)SdO¿~¦uÇ
?yôO   ™Lþ£‚@J       4’G§¿%%ÿýB®¹q¸ÕòØ2àìê
R•û*­±*ÿ#»w
#IuF¦õ¯ñ÷e
±zB
9lý~Pþõçä?³?•»ÿx±t;±Ã÷ÛÔóI‹÷ØA>zwkB“×g‘Ÿ_ó¾h=§ÃÏi"Pµc‡9ӌæ5­ùirڜfÿpÙôô3¤Ý
½÷&üýG}?3ó¯Oˎ[#^™Ì7«HFƒM²%óðY:w½àž‘[ï%Ս2¤xå©ï‘oqÑZ¹ë5ƒþ
nÜTª7©KÐH¤Z›ß2’]ßTÊ/®x^îr¬ôî[Ó2Yw§ºk†Ÿ’
˜ñ~LN¨¬{-X™@Õ75­ùM»t‰l¶JY/†K[{ª·â/²íºk
2       ˜öUá/)  ­Ž‡2³¬yÈ´BN½ú%©ÊÈ°ÖeJ›vY2ñªé? ›ÔnûjËÎïÂ¥µ“fV(õkµ
êÒÈ
™M­VÎ
ɬ: ÷N#>÷ã:-¦AwµVڏɋ–¯wý1ùW֘›
”Ö°CՕõ €€¿À®™Ï™Çâ^i¹ô¯›~Öñ5ýCf†ÕªíIµËŒå;35öAÀãÚúxØz´Ý¤ªR2««å¸Meºõ(;T
{o}ŜQUfÓÂå÷'Øz„.˜0û—GÉ-·_ôýa>ُɵ7ùÏo>õ{œaŠ6?i¨\nµùÆëkeͪ]f
ïTÖ§Æï PŸ€ö×=^
—vý5djg}T®Ì;ü}¦cÃ%ÙǨï/³>!~GÀÃvZùöæ:µÔÖEóȼê lÛ´7d }4¾ñÓ]æ]Kë”~Åa+Ì6®>d
Ë_yõΐ!¶v)'÷ïd
“\ò
üpÀ‰µŽú»má*µ1ãzʙg÷ªÓjõØÒZ@ǹԡˆtF

ÈKcN»0ÚüêŽ;e÷]wÊöéwK‡
¶™k똮ÑR0î
RYUU’ôpÖ£ìLë‘wu¦Õšy h âë̞c]ôM}T¾âíUrñeƒ"*f 5Pû3Kñ»ëc˜Á,ôà*
v“¾]
o
èäØRN@Q×E[ë›æÑ+'¯3
xÿ}3 ûnk@vý
¯
€/iŽƒ@Ê­aƒÞx½Ì<ò]k=òm¦=¼
ñ©7æ–ÈòC
A{‚ë¤
s–/Ú`íg•Wï{—!‹7ãõÿ™|¶úëÐÕúEç"ïf
‹¤s“ÿøÚ¡ABe-
H¾"€€ëÎt.p3í£Õ2˜LKë_üR¶¿'{ž˜!-‰Û£rf2Ý%Ô5­4T–Xƒ‘/˜÷‰¬\±Õwîç_x¢,›³^úh/7üâ
³~ɂ2ßï¡>ët鵧˜žàC
* ìúF¦Ãö^¿åö°üxÆðî²aU±Ô÷˜œPÀƈ£@Uy¹
gúhüèŸü$ŽGvæP:U¥¯÷¿}é%i}õÕÎ\O)Ìz€øx
„
•Në _r²ï‘ïží/Å<Ž¤
ËÒ©El#kœÌh–pÉ •ÑH²-¸% ¡¬zëVɱÞgtj^q·êª\
#s5¼vPjqæ™Ò¬{÷P›:¶ž€é%!›@¸P9òüÞR`Í|“[kÎn{
É%Öcó‹.þq ÆÕU±U¼Ö^ŽT‹ÎðÍb?&/zk“\÷
Be4zl«›úÄbÛåÇõx]ŠKâz<( c^ÚÓ@¶><ðÇ$û–sýdÓ«|ߒ%Ì$»vTˆ*+JÑ»ëê<þ֖ÊP¡Ò¿
ðþõ}¾)K­‹)`jYÖðE«›b3¾ûk¾ÄðYïƒê¿~‹zï¼ÞídáËkä§WüM>ÿbŸo:êø(ø€
سh‘9r«ë®÷|¯ñúˆ´WùîïZ1;ÖõÖXZ0ë»"üŽ€C*KK6YÁrƒÌžµÚWj¤¡Ò·ƒõ!+«©Œ¼$ÏtÙjùÝrÄ
ÄÞØŒ]—S†t”–m±Âf•ÕY'¶ÿ—ñ]+èÀÓ5øÖ¿ø·Tn°:-e[×¿Þ¼ß×i‰Þßõ²E
@ªµôÅ»e6P“o¶À>ëñ¸.ÉÞziŸO«‰“Ì»˜{.”ÜË/·W»ò7¶ÿ6q¥*Š@ê        „
•yVïéË'ü èãïHú<ÁÌ7–Fº‹ÕÊXm†+Ò¿]O:Znšv¾Ù÷ƒeÏKãÃc
˜5U
ê{rWS^°ÿêUm©|÷?¤àÔ¾NKÁög
 OŠÒR©*+•–×Mv¥õò³Ï>‹ètŽ;î8«Q!+¢mëۨŠÓD›$*. `ևÅïxM \¨
vNlÿx¬5DOC
œ<÷˜,ycÎZ9©_›z‹ÓËL+DêrÁø“ä'×ó

tÆ'˜Òõw2š%ÓÈ]äˆ\uÓÀ:SE†
•ÃGt•áçöòuZºúZçgó‰æ
ب-PQTdVe»4,ÑW\YûA¿?ÿüL9ñĆOF¡
ëàð:ÔÒ~«L
8ÞÍñÚÂX`u ºåŽÕieÔ
Îm)¿r¼Ürõ
&df
9lµd6³Æ¶l¼\ëwmÕòsÛeÉϧŽhP§¥ a%I, ?juJb†¤­º¶îéãqmísk5j”[E‡-7»_ÍÈ
:ϸ8³3ìeàGê

•m­5ùÆS
{ü]÷¨Á×t;±½™
G;Ê.
yn˜6TFŒúaà&µ¾
Û±µ     ™þß)±voZ½ß
ž^muü±ƒ¦ö×=ú§.y'·•Ì–VÀ¼v¶¯´p-•¾ø€@

”[sۏ?‡
,½{Ÿ$íÛ·—“N:Iœ|Ÿ.
        ~j•«V™:4ë×/áuqºú˜¼éég˜é#ÅÛÓ­
€é–,妔@¨P9ñªé? ›äçwNØùÚ³ád4nlê¬#O·;DT?
™÷<|
­•Ù/¼g‚¦vþ©½dç4•ÝûªåÃO¾µ~úV•µ
øžÎ›7oöþ²eËEÿù/}úXãÛô•îÖ`×ÚÊ©Á“Å[U_×L{Û´KoUÌ¡Ú4íÝÇL}y`Ý:×ÆÄ$`:t±(&õ¼
*ýµÏ<'_žy´XY3\G
ÿ}êû¬ïhê¿]å{¥ÌZéþ_/°vÑÇåGLkæŽ
‘ƒ;F4fg}ÇâwRM yóæríµWË'Ÿ|Z'\ê¹~üñ'æŸ}Þ÷Ýw¯œuÖYöWþz@àÐêïZ0ã0ãM"N·É
'˜ÃVíØAÀLÄà˜é'`Ï8럥¾w*õñ·Z*C]£­Y~Z
ÝDöì:$MªÊQ!:ò„Ú?ØzÿŽ:%oo–
k#bR[GµSÏ´;†Ê™Ãûەu¤½€¶Jú¿©ïcnÚ´IÖ¯_4tîßoý/6O
,~O2­AÉSu±[f«¾©i©uãÞ%Í[6‹*\ÚÃ+-úÏ*Y´p£ï’é;•Ã†çÉß
z[¾ÝYåS;ûhØÜøé.ù¤ôséÝ÷xß>|@Ð¥­Ò
ö IDATÖ Ý·Ý6M¶mÛ&Úñg«`Ö­«h»£‹Cń®¿¤³€=þe՗߿/ì´ÓiQÊó¬@ª
Jèëu®ä¶Yá›:²C˜ÜíPYߔ•Ï>õ¦.X-—MMorûx:F¦O4wöL
¿„¨¬¬4­–/¼ðO³ÅM7ýJF
-C‡Ö¼syÁ5³i
ØÕ     Ў/º4éÙ+GOC0SçZr&Aô±ïŠwÖÊk¯”ù
ëfÉÚRäÍ*
ÇÒêÈ   W°i¨PiÙ9Ìê(”k½Ëi/>Û*ÿúó¦COUãÀÿ7Qݨ±iÅ\:w½\2a«DÚCÝ.›¿¤‹€«¥ö
¿í¶[Í»™þSö왗.
Iwž-¿ÿÿ‰IWyT8ð¿98}ž)¾*³™õ·î`ë:6¦¶b.[ò)³ö
à»ç

O‹k
íVK{>éO?ýÔwü®]»ú>óT `¦ÒÕLãs  *íñ
v÷Í»ªL:Ýâ#N”Wg~,wO{EÞZ²ÙwªvKe¸Pio¼pÎûæ
K}×R[+ƒ-‡­€Ù¸ÑAÓÊyáŧFõÞg°òX‡@*
\vÙe§·î»G°º²sçč¡P)¾ø·ic>Z[ó¨Ü÷¢ `FÅÅÆ^¨/Tô;>౯—êîd]ü[*çÌZ-
ÙVGœ•o})фJ»>:îå£Óß²¾6’C¦õÒþ¥î_}7Sç"íå÷dâÿÔ¼OVw+Ö à=¢¢ŽWJßµ|õÕWåÁ
6e×nµô?`II©ï+
||žù™›kêRýínÏÔÉéŠTWº?4Óé«Fy®
h˜*zw,˜÷‰ØCéèí–Êt
•³­Pi/*+¶WšùÄzäÒ¨[mÿòÈ"S”ŽyìѸ}
ý{ØjáÌ´‚¨¾«9nÂਏå_ŸHf}§òž{î5ƒ§û¿kìœ4ˆê@ëºhor!phó—æ°nvd"`&âÊr̨ü[èüᲆ
±vKå+ÿ*23û|õe¹õ~dûˆ­uzHí¸cyYÿŽÌؘ:•ä[‹Jëë¼þò؁䈦ÕÒ>³/¿¬ù/vý®s”³xS
su'òÌ«+jZ0ÝìÈDÀLäæØ!B
J
S^”/§
ê‘v¿ýÃuíPé9òG§ˆþÓw2#]ÔûÓ_7›WY¾#]´‡¹NO9sF‘
µfö‰æ˜‘
ƒíð¢@4­–þõ×Aן~¦™Ù§KŠÎsí¾Éú9#'ÇT]%gde'ëi„¬÷ÁÏ7šßš
ß5ä6
ý€ÙPAöwL \¨
vN‰¤ƒŠc•IpAï­\g½
°A"
•þՍ%äÍzn¹ìú¦²Î˜—þåÿlµbZÊuß²>7ó—ߎµ¤†@íVKs|„     Öÿ¸ÊŠøí™}"ށ
ã.Ðì‡?”Ê9¯É«£Ovßԛ2ÒîÀÔ¤S'×l   ˜®ÑRp¤
        S‘
#¶++ûBŠWnùs×øæA×RéÔ9
ó2’chg>ò™Çß&`FÆ6I+àßjÙ¾}{ë½ËéÒ7ÃGÒ^ +n·ìiK_<æΝ;¥¸¸Xtت¼¼<Ï$xQ•‹IF‡bwh
¾UÃÖ0æÇÞ1
$*LÅX]×v
æ`σ>bd_96̌ªVˤ:a*+Ízt7
‹KΨ
]Ù¾}»L›v‡LŸ~—ëóЖ-¢s­7¿âJWϋ€é*/
û
x!Lù×'QŸÃ9ô
ÐMòóã7.ž=æ¥Z49TÙ`’ÿë}fƒ)ÀK´Zzéjį.úÞ¥vô9øöR©*/wµ¥Ïÿ¬öîÝçÿՕϕ«V™r³
r¥|»P¦-Á_W¼¦\9Á
õ¢ƒ¾óZòß/äŒ
Nˆð,"ÛLÇÒÔ©+YHv9sæX-J÷˜Ó Õ2Ù¯fôõoaµ\jÀ¬øàiuöÙÑÃ
-ã0=å>ëÝR]š¹ü(ž€Ã
À.ἦÂ×؝_½î n¹ý"wNžRHb-Ö#Ä
xP–-[.¼k™Ä²UÏ>å)·ÊÐ@¯€év
¦>
×Мe
g7ß¿Tzfo@v¯øjK¹,_¶FÞx}­¬YµË¬´ß%Œ÷cßD^¯‡ÊDÚpl¼"Í\äÛ¶m“«¯¾¶AUwcæ
Uˆ#ЦAL{“k0kÒ±cDûE²Ñ‡~(ë×om±ÔP¹wï
³Û*ëñõË/Ïö­×ßÏ=÷ÜHŠŒh›=óæ™íZŒ‘•+¶úΐP)B¨ôÝ|@ ©hµLê˗°Êçþìç²Íê}]þàÒìqë=F—æ'w£yEi©ì~¦×3^½áõB0v»z
ãÀ¡Bå€Ó:ÈÈó{KA¿ã­ÿUß•u±ÁZ*õpé®]$¦h.ðæ›oÊo~s«©­–  ¿
IUfÝ»K«›o‘=ü^v>>CÚN™âJýnÁÔGã;ný©«†äx.Ìxj{äX„Êš
A¨ôÈ
I5pY Üú/ÙG
yTæΝgƵä]K—ÁS´øœ‹FKŦ5pŸ5
Ž“=±uþñڝϜ`Ü>ýn3-dŽõäx.Ìxj'ðX:kKiÉ&yùÅ
ÓRYsQh©LàÍÉ¡pQ@[-z菢ãYÒjé"t­Å¹ç^ÙvÝ5¦ÓOæ
ÿŒ{h‹†yç“OúUÇ|êµëFÀ¬-’BßíPYôî™=kµïÌ•5„Jß-ÁRR੧ž’?ÿùIÓjyß}÷ÒC<%¯r|OJ[Ïýí
í&`~c:Ðþ‰¿8:»Sg£áRǼÔùÔÛNêT±Q•CÀŒŠËû‡
•y½Ž–açô°þåóNe×éý;–"àžÀ€äË/·ÐCÜ=â´,Ù<ôO&djk¦×B¦
.3:t6ÿ{‹k
’ê»øŽXK}ñ»·ê
•ƒ‡äɱ
Sø
Þ©ôö}JípC`SÿSl—â7ŠOX™©z^     uáÀûŠŠLÈÔ §­šN¾“Kuu¦ž]3ŸóÍ֓èàK
f,WÑ#ûèÀßK¯
xüm·T*Ókf!Ü’THÿ–L
ˆý ÕË<÷òËrþÚ[\;ô
´†RÒÇâÚréäÜ鱜-˜±¨%pŸ`³É¤[¨Ô^ð+ÞY+¯½R–ÖƒÀ'ð6äÐxFÀnéóL

®HªµÌ:Ìã‰â¬['ú>fõÖ­            w{/–Ý=`ŽŸ5êBóÎ¥[ãtFNÀŒF+AÛ
•:ð÷yäɈ‘}Óâñw¨¡•è¨“ ›’Ã"à¦G.DšWCOo¿ÿ~3ۏR蘙:¬‘›AOƒíîçfúŽ©C%¢·x¨KOÀ
%“àõáBeÿÝ$?¿s‚kèþáC
J»|áÀÕÔýŠpH{ÝsæXs9ß%í_xÁÓCÓ¤ý
J0€k¢¾›Ùêºë¥Åà!’éà4¤µƒ¥¶Zæ^sm‰צç
ÌÚ"     ü¾þ³m²ô­Õ2îÙþu¥©IºMQX_¨L—™
xrh@t*ƃN“=‹ɞ'fXÿ£äNÙm•ÕüŠ+%Ûœ=»_AL­šúŽeÅȞgÿ.Ue¥¦v™ù}%çúÉ
ï\ŠŠ€J&Nëƒõ|&TÖàÛ-•„Ê8݌
@ ÁúX\U·>ÜÍ}/½dfÿÑùÀuÑN8ÍJf»vÒ´K³®I§ãLðÔ
yxdz®rÕ§rhí:9Xò‘/TêÚbÙêⱒݷ¯ÙΫÿ‡€™€+,Tj5ô}Â3ÏîÅãï4š=·‡Dˆƒ€
45l
Ú²Eö.]*V™žÞÚÛ;šECe¶L³O9ÅÑÇíÑÔ!Úm
˜ÑŠÅ¸}¸PY˜&óø;ƛ‡Ý@’ZÀ̤CYÿ´CСÍ_ÊÁM›¤zÿ>©Þ»OöYu´zó+&H“
Ý͹6=¾«d¶iã¹w+#½ÌH¥b؎P)B¨ŒáÆa@”ЖÍfÝ»t;´zµÕ|Ž´2%eΛ€éð¥
¨Òi8P¼SéðÍFq €xT€€éÀ
        ¨†è*ÃÏí%}
º¤üp::]eÑ»ëdÁ¼Od劭>UB¥‚ Ä‡Ö®5µol=²dAú˜õÝ"T¨L§@jôt2zs°RN
úÛoÍ999žaÊ!qBø       0ý0"ý¨ƒ ÿrò«¾ÍÓ)P

•:]åå~
)ä»-ø€ €@Ú
0c¸ôÇ
×Ú쥡êÞÿ#¹¹-b(%yv      *‡ÓCÉK‹é*“çŠQS@+@ÀŒÁ_¥¶Z껆ÙÙMb(Áû»*½¨!
€^ `ÆxeNÚÝÌҒMrê€î1–â­Ý•Þº
Ô@d
`ÆxåN9åxkÏeòqٖ¤˜„ÊovC@̐4á8¶c®èœáó箑ŸüôŒð{ìWB¥Ç.ÕA@ Ř
¸ ç]'Ïþ­DÖ¶MN8±}JrWB¥ûÆ
@j˜
¸úäw´ö.‘ÿ¾¿Ñ““Pـ‹Ë® € ³3f:13ôèîï!—\Z؀’œÝUÇé,^¹Á´®Ú%ëJ
)dkð@Ü `6@7+«©o¸"Ù'‘ãaÚ¡Rß     Ýþu¥9+Be..»"€
€@Ì̘éjv´‡+Z·ö«¸÷&*µãÑÄ«
¤ÿ€n’Ÿß¹gÇî € €@ô!æÔ©¿‘œœ
™2åWÖ`âÙAK^³f<õÔ_¥OŸÞ2iÒ¤
Û¤úJ{¸¢¢w7Ä%`*SýŽâü@H~³K—Îò÷¿Ï”¡C‡ÊàÁƒ‚žé믿.K–¼%Ɲ
ô÷tXiWôö[ŸË
¿pçŒ    •î¸R* €¸#2`
<Ø̧Ÿ~:hÀ¬¨¨0¿kµú÷ïïN풤T7†+"T&Éŧš € PG dÀ<ù䓥
¯”””Êæ͛¥S§N;¯^½Ú|Ÿ4éJiݺuÀoéöũንévçp¾
€¤¦@Ȁ©§;nÜ%&`.^¼¸Î;–=ö'#¢-n,[óóÝ(֕2Û5j!rôʆ+
*s3«­Ž:'ÓQǕ«E¡ € à¶@؀i?úž=û•€€¹sçN<µ
S[:Ó}ivdŸ
ªÚ!﬉d¸¢P¡ò¢ƒ_JÁ¡Ï¥çÁ2éðÓ²tgåü@@
IÂL}ô}æ™CMGžåËßñ½‹Y\\lN÷¼óÎsý´;”%GоäygÚb   5\ÑW[Êeá‚R3w¹=Ne°!
’©åÖõ‹Ï@@ )ÂL=£ñã/7óÃ?ðÌY³^4'«á“¥F /ïXóÁ¸"
•Ë—­‘7^_+kVí2¿
•"€ €©$PoÀÔGà
;
kzŒ?^¶oßn
k¸
Õ¹G¡k+§>bµM*!ê¹èpE:sÎìY«¥C‡£B¥þ>f\O9óì^
~®, € àÈ8ê(󹪼\2ss}ë“ùC½SOn̘‹ä±Ç
7-™{÷î1ç«-›¡–9sæ˜í_ziVÚLµ(<­‹i©|ü‘÷
†ÊÝ̜å:­$
 € P[ I
fÕá
;Ò+`Ž5ÊÆùóç›ÖKmÑ
Ö¹G‡3ÒN
£ºìß¿ßüM—ÿsÆО²wïBeº\pÎ@‚
DԂ©¹Gþ‘¼úê¿M!Ç«SØË/ϖûïÿ¿€õ͛7øžê_N8±½5›Ï9©~šœ € V
#ì¯~?ꔑö2zôhû£ïo~~™:õ×2}ú]¦ç¹þn-˜>
> € €i,Q
¦úè|äEEÖ@!–¼¼<Ñö¢s”§[
¦}îüE@ÒY â€
ÒÞ½ûÌæÑ´`VWVȁµëäàçåõ÷P³&¦Œ¯ïºS2ë$;´—¬^'I³îÝ£©
Û"€ €ÄYÀ•€Ù²¥5u¢µD҂¹¯¨H*ÞyGö??3ðÔ3jžÞWÎyÍ·~÷wŸZ^7YZœy&aÓ'Ã@@À;®Ì
HZ0¬[';îùT••Ìü¾’=b¤dõé#M:u
è¦hË©²ºîWXatÿ«³eY£.”Ük®•&
;zG”š € €i.àJÀ
ׂ©ÂwÍ|ÎDµ×˜3áÊ°­‘ õ_vß¾Òúê«E[=wÏx\´uó+ë_Î
wJŽU
 € €@â\   ˜¡Z05\~}ë­rðí¥¢-–mnûmØ`Š§Ea¡è¿=‹Ëî‡
ÝÖ{š‡·n“£¯œ YÙ¡vc= € €@
\      ˜ÁZ05\n<Ù<o~ŕÒzòõ
ƒ­Î>ÛêøÓKvüá÷¦Eôà'K»{ïmp¹Ñ¸oê_Íæõo›Uóî©ãåú
¹Kq‰ß7>"€ €Î
D<f4‡­Ý‚i·\êû–ÚA§í”)Ž
@}t®¡²éég˜–Q}ü΂ € 8WZ0/¾xŒè?{Ùùø
þ4\ê;”N/úX\C¦>~×@:¤Q¼ßÉL†VA7[E¾¦”‡ €É+àJ
¦?‡¾'©Ci
£¾#éÖ¢!³í´Û%£CóN¦ö
ÏÎζÞÇ\bÂe‹-ÌOÚÂI륭Ä_@ˆ—€+óÀºu¦þYƒ‡Äë<ê
G‡-²_¯ócŠ­˜3gŽŒ3V–-[.ãÇ_&§Ÿ>؜a¤¯
¤§ƒ €
påùÁM›Ìi5³zt'riÚ»à]¯¾—™j‹ö$àM°lß¾½ÜsÏték™žfNµk×®©vʜ
€$€+³zÿ>sê™mÚ$”@gôñÒb?§ë¤Âo¼ñÓk\C§½tîÜÙþÈ_@@ n®<"¯Þ[0ãv!”yL;ó‹
Ý¢b³¤_­Ã6é{˜ºèðEöÒњ§@ˆ·€+-˜‡V¯2çѐÇÒÚ+º¸¸Xô1o^^dCÕƳ[PíÕÚ¿Çû{Qъ
Rßµœ>ý
S†«¥¡7nôýÏ € €@¼\
˜™Çu2õ×ùÀcíE¾}ûv™6í+PÝsÀŒ¢ÛÇ©ý®å”)¿”³Î:+èaW¯^cÖÓÁ'(+@@ ®LûÝÇêýû|
{ð¸½rÕ§æøMïÚàz$ª
ò¡‡þhSÕjé_·_ÿú™0á
ÿU|F@â*àJÀ´Ï º¢Âþóߖ-kÆtŒ¹kÇ
kŒÈd[tðôG
yÔLŸ©=Äï»ïސ­–þç¦ã^ê ì, € €@¢\     ˜v‹áÁÏ7Jv‡*jH
æ÷ß7®M:
—(ߘŽm«eLa'@@À%Wf“N5ï`š€7ꈪþá‡ÊúõD[,5TîÝ»Çì·jÕ*yùåÙ¾õúû¹çžQ™‹ß3³
é ëÉ°ÄÚj™
çF
@@ }\     ˜™Ö9:Mdåœ×¤zêT‰$à͛7_^}õßuäu]íõ‘̊ÒR©ÞºUš
S§L/®ðoµ
2d°üö··ù†
òb}© € JÀ•€©Ë
1Rö”•JÅG%Ò¢°0Ôñ}ë'Mš(—\2Ö÷]‡ÛÑ^ä?ÿùd8p o}¤*Šjæ ώàؑ–ÙÐí"
h]§|
9òüˆ×Ðá">"€ €¸0[!{
ø½ìùç?"
˜¾{¬^»Î-[¶Šz˜¢êÊ
ÙÿêlÉèСÁï€Ö®ß@@Â
¸0õ1y–õþ¥>&×ÇÕ±vö‰¥ùžE‹Ìãñœ;î
öqþÕniô×R«0mÚm2jÔ¨8׆Ã!€ €î¸2U¤]՜      Wšå>`¯Šúo´½È«¬á}ö<1ô^¶><êã¹½
C©¶üã«ÌðCú®åìÙ/.ÝF§|@ˆ«€k-˜z:Udó+®”ýÏϔòüCr/¿<꓋¶sçÿû£i½Ì½ÿ÷u.ŠºB1
îPYY)3f̐^ø§)VË!Ù
@*oóèŸÌ£ëm×]#\v[­–;nø™
—íŸø‹h£D/Újy饗›Gâ¼k™è«Áñ@@ žq   ˜zB:¦
25
j(lè¢Ãmè!Ù}ם¾pÙÄ#žgÏ~Å´ZÞtÓ¯äž{~G«eC/6û#€ €@ÒÄ-`ªˆ†Ìcþú´        ƒ
·\õ9°n]LXÚ
ºeÜ%¦‘¾s©-—^   —zB7Þxƒå”°·õýͽK—JÅÂReͤK«›o‘œ‹F'¼Çø¦þµOUšXk6ÕYË
@@ µâ
0•S;þ´2E\x¡ì~n¦éù]>õ)·~Ó9Ì3»v•Ìã:IãíåðÖmRõåf9Xüžy‡Ó¾
-¯›,G
6ÚÛò@@ ~             ˜öéiçŸvÖl;U¿ø¥T|ðT¼½ÔÉÊïZ'ííô¯ö×15³
’ì~    o±´ëÖ¥¸ÄþèÈß­ùù¦œeeŽ”G! €
€@¼0í“Õ^ß:n¥ÿؕ_Ôapø @@ zfôfì €
F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €a˜apø       @@ zfôfì € F€€‡Ÿ@@¢ `FoÆ
 € €aþ?³Ð
–¯+ÍLIEND®B`‚

_______________________________________________
Hosted by the MEMS and Nanotechnology Exchange, the country's leading
provider of MEMS and Nanotechnology design and fabrication services.
Visit us at http://www.mems-exchange.org

Want to advertise to this community?  See http://www.memsnet.org

To unsubscribe:
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
reply