Hello Ahmed, what kind of problems do you face with using primer? Would it be possible to optimize priming step in order to avoid the issues, rather than skipping it? And important information missing - what is the top layer you are spinning the resist on? Without a primer you would have issues with adhesion of small structures, they would either delaminate in developer or if you follow by etch, you would severely under etch. But it is all relative and depends on dimensions, smaller the structures easier to lift. If you are making 100 um contact pads than most probably you would not see any issues, if you want to make 2 um lines than all would be gone. With best regards, Daniel Daniel Figura smartfabgroupT Company process consulting . data processing . fab software Phone: +421 944 45 26 86 E-mail: daniel.figura@smartfabgroup.com, Web: www.smartfabgroup.com Disclaimer notice: The information contained in this message and any attachments is intended only for the personal and confidential use of the designated recipient(s) named above. If you are not the intended recipient of this message you are hereby notified that any review, disseminitation, distribution or copying of this message is strictly prohibited. If you have received this message by error, please notify the sender immediately. -----Original Message----- From: mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org [mailto:mems-talk-bounces+daniel.figura=smartfabgroup.com@memsnet.org] On Behalf Of Haider, Ahmad M Sent: Monday, January 13, 2014 21:17 To: mems-talk@memsnet.org Subject: [mems-talk] Shipley 1827 resist without hmds or p20 primer Hi, I am using Shipley 1827 resist for photolithography. Till now, I always have a pre step in which I spin p20 primer onto the wafer and then I spin the 1827 resist onto the wafer. I am facing certain problems with this. Can I just spin 1827 on a clean wafer directly? Can I get some help with the process parameters? Thanks Ahmad _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk