Hi, I work at the Nanotechnology Platform of IBEC Institute of Barcelona, and we would like to use NIL system to replicate a nanolithography silicon master (with lines 50nm width). We need a Chemical Vapor Deposition system to deposite fluorinated silane to improve the antiadhesion properties between the master and the polymer. Do you know where we can do this? Thanks a lot. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk