Apply some HMDS coating over the silicon wafer befor spinning the SU8.HMDS
will improve the adhision between Su8 and Silicon


On Mon, Feb 24, 2014 at 8:08 AM, Sebastian R Freeman <
sfreema1@binghamton.edu> wrote:

> Hello everyone,
>
> I am a graduate student making microfluidic devices for the first time. I
> am processing SU-8 2050 negative photoresist on a silicon wafer to try and
> produce a porous PDMS membrane. My difficulty lies in producing the the
> SU-8 structures. I have been having adhesion problems, as well as getting
> my structures to develop uniformly. The pattern I am trying to make is
> composed of an array of tiny cylindrical posts 50 micros high, with a
> diameter of approximately 5 microns, and spaced 15 microns apart from each
> other.
>
> The PDMS spin coating is also creating difficulties. When I attempt to peel
> off the PDMS from the SU-8, the PDMS rips off my posts. I have applied
> Sigmacote as I was told this would lessen the adhesion between PDMS and
> SU-8, but it appears to have only helped minimally.
>
> If anyone has any good advice or suggestions of new approaches, I would be
> most appreciative. Thank you.
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--
Sajeesh P
Research Scholar
HTML Lab
Mechanical Engineering Dept
IIT Madras
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