Hello everybody, Thanks for the answers. I will try to answer to all the suggestions and make clear some other things. 1 Sophie, I want to make LCD's so we cannot change the substrate it is a soda-lime glass with ITO on it. 2. Joao, I am using SU8-100 dissolving it with GBL if neccesary. SU8 2000 are not possible to use as it uses cyclopentanone as solvent. 3. Bill, The kiln is not an oven it is a kiln with ten sections of hotplate I can set up temperature for each section and how much time the glass is in the kiln It not an oven we use. 4. Nadim, The layer thickness we want to achieve is 15 microns. I dont actually know what thickness we have (it is close to 15 microns). Usually I have a two step cooling in the kiln first from 95 to 65 then to 45 and then to room temp. Increasing the exposure time spoils the patterns we have to expose. Another thing I am not coating the SU8 with spin-coater, but we are trying to coat it with screen printer. At the moment the layer is not very even. So I have seen sheets where the SU8 is not developing at all where the coating is thinner but is lifting off during development at other parts. I will try to change the cooling of the sheet to slower rate and see what will happen. Another question from me. How much the post exposure bake could influence the adhesion to substrate? Thanks everyone for the answers, Janis On 11.03.2014. 17:05, Bill Moffat wrote: > Hi Bill > His problem is most likely underbaking. SU8 process recommendations are specific. Hot plate is recommended, not kiln. If what he means by kiln is an oven, he is probably forming a skin and trapping solvents and not baking enough to get them out. > > As far as an adhesion promoter that he probably doesn't need, APTES or GOPS would do. It's epoxy resist, so either epoxy to meld our amine to bind.... > Janis input from Ken Sautter our senior Process Engineer. Additional thoughts, adhesion to ITO has always been difficult. I quote Grant Wilson a true resist guru, "we have always had problems with adhesion to ITO". This has been solved partially by treatment with OCTS and totally with treatment with vapor OCTS. This is unfortunately with standard positive resist. It may need APTES or GOPS for adhesion to SU8. Bill Moffat > > -----Original Message----- > From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org [mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On Behalf Of Janis Klavins > Sent: Monday, March 10, 2014 7:51 AM > To: General MEMS discussion > Subject: [mems-talk] SU8 adhesion problems > > Hello everybody, > > I am trying to coat an SU8 material on ITO etched glass. I have a problem that during development the SU8 lifts off the glass very easily. > if the glass sheet is immersed in the developer the SU8 lifts off and floats away. > > I believe that this is a baking problem (too much or not enough) after coating the SU8. I am using a two step kiln 65 degrees ( 1 min) and 95 degrees (4 min). The same settings for post exposure bake. > > Has anyone seen a problem like this? > > -- > Best regards, > Mr. Janis Klavins > EuroLCDs > Phone: +37163600300 > Mobile: +37126141049 > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://wwwmems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk ------------------------- Email sent using Atmail - Email, Groupware and Calendaring done right. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk