this is CMOS related and not MEMS.in CMOS when you use LOCOS isolation, you
sometime implant below the pad ox (the oxide below the nitride) in order to
prevent leakage between the channels that can happen due to inversion layer
foramtion.a guard ring is a implanted ring around the channel to prevent latch
up of naturally occurring NPN or PNP parasitic transistors in a CMOS circuit.

Shay

 ----- Original Message -----From: bhargav panchal
Date: Thursday, March 13, 2014 16:27Subject: [mems-
talk] DifferenceTo: "mems-talk@memsnet.org" > Hi> > Hello
My name is Bhargav. I am vlsi student.I am confused in the > difference between
channel stop-implant and guard rings. Their > purpose and fabrication are
same....> > I searched over internet but no answer. Please if you have > answer
let me know....> > Thank you> Bhargav>
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