Hi,
I do not have a particular experience on Protek B3 but I can tell you
that CF4/O2 plasma will definitely give damage to silicon nitride layer
as well.
Best,
Kagan


On 23.04.2014 20:32, Haider, Ahmad M wrote:
> Hello,
>
> Has anyone used Protek B3 coating for protection against KOH and knows how to
effectively REMOVE it after KOH etch? I am doing a process in which I am using
4.5 um of Protek B3 coating to protect my Silicon nitride cantilevers against
KOH etch. I would like to know how to REMOVE the B3 coating after the KOH etch?
Both dry and wet removal processes would be helpful.
> Note: Since my underlying layer is silicon nitride, will using CF4/O2 mixture
to remove B3 coating, remove silicon nitride as well?
>
> Thanks
> Ahmad
>

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