Thank you for the reply I am using contact lithography with minimum feature size of 5 um. I won't be able to use focus offset to focus at the bottom of the pit. Malar _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk