Hi Have you following the protocol from microchem website.I am doing with su8 2075. It has two steps of pre baking and two steps of post baking.When i read your post i seen only one steps each in both pre baking and post baking The two step pre baking process will help you the strain hardening of SU8. Otherwise there is a chance of bonding problem.I also applied some HMDS before coating the SU8 as adhesion agent . check that also I am also beginner. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk