Members of the MEMS COMMUNITY,
As you are aware, a Micromechanics Information Clearing House has been set up
here at the Information Sciences Institute (USC/ISI). As such we are looking to
archive relevant information about the MEMS process, activities and facilities
around the US and around the world. To this end, we have come up with the
following survey to gather basic information about institutions and
organzations with micro-mechanical processing capabilities. We would like you
to provide us with information about your facilities. At a minimum, we ask that
you give us an overview of your facilities in the format suggested below. Our
goal is to produce and update a "Yellow Pages" of capabilities across
institutions and organizations. Other, more detailed information in electronic
form is also solicited and should be submitted separately for inclusion into
our archives.
Please note that this information is to be archived at ISI and will be
retrievable by the mems community all over the world; therefore please do not
submit material constrained in any way. For instance, you should ensure that
contributions do not violate the copyright laws. Please also get appropriate
permissions from your relevant authorities before submitting materials to us.
The name of a contact person is requested. This need not be the submitter of
the information. Inquiries can then go directly from the requester to your
organization. We intend to work with your contact person to get periodic
updates as well as to provide relevant information.
The following section provides the format and general instructions to
facilitate consistency in the archive. This is followed by the template that
you are requested to complete and email to info-mems@isi.edu. Please also feel
free to direct comments, suggestions or questions to the same address.
_________________________________________________________________________
Instructions for Filling out the Template
1.0 Identification
Self explanatory.
2.0 Processes
1. Specify the baseline process of your facility, e.g. 2um
CMOS. Please specify technology and feature size.
2. List the types of MEMS processes available at your
facility, e.g., surface micromachining, bulk
micromachining, or LIGA. If the process is unique, please
include a very brief description.
3.0 Fabrication Facilities
1. Size the total square footage for all your fabrication
facilities.
2. Indicate what percentage of the total area is for
cleanrooms. If possible, please give a breakdown by level,
e.g., Class-10, Class-100, or Class-1000.
4.0 Devices
1. Please list the types of microdevices that have been
fabricated at your facility. For each device please
describe its generic type as either sensor, actuator, or
structure. Also, for each device give a generic very brief
description of what it is, e.g., motor, pressure sensor,
resonator, or accelerometer.
2. Give an average of how many projects does your facility
processes per year.
__________________________________________________________________
BEGIN TEMPLATE:
MEMS Fabrication Center Information Template
1.0 Identification
Name of Institution:
Name of Facility:
City, State & Country:
Contact Person: (optional)
Contact Person's telephone number: (optional)
Contact Person's email address: (optional)
2.0 Processes
1. Baseline Process (if any):
2.
Available MEMS Process
1.
2.
3.
3.0 Fabrication Facilities
1. Size:
2. Cleanrooms:
4.0 Devices
1. Fabricated Microdevices
Device Type Generic Type Generic category
A.
B.
C.
D.
E.
F.
2. Production capacity
END TEMPLATE
__________________________________________________________________
For our records, please tell us about yourself.
Your Name:
Your Title:
Your daytime telephone number:
Your Preferred email address:
Thank You for your time and efforts in providing information of use to the
other members of the MEMS community.
Regards
Peter Will and Sridhar Gullapalli
___
Sridhar Gullapalli, sridhar@isi.edu
USC/Information Sciences Institute, +1 (310) 822-1511 ext. 790
4676 Admiralty Way, Marina del Rey, CA 90292-6695.