Thanks for the input. Unfortunately we are limited to using microdev developer for this process due to material compatibility. We are also not using an automated developing system. I have done quite a few experiments using different bake times and temperatures and have also found that higher temperatures at longer times works best. The biggest issue we are seeing is small LOR dots in the exposed area that will not develop away. They appear random and vary in thickness. Some of the features are smaller and these "dots" cause the device to be rendered unusable after metallization. Joshua On Tue, Jul 14, 2015 at 12:52 AM, André Bödecker < aboedecker@imsas.uni-bremen.de> wrote: > We had also problems while using an automatic developing device. The > undercut depends among other things on the abrasive effect of the spraying > direction of the developer tool. We made better experience with manual > developing in a petri dish and always using fresh developer. > > André > > -----Ursprüngliche Nachricht----- > Von: mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org > [mailto:mems-talk-bounces+aboedecker=imsas.uni-bremen.de@memsnet.org] Im > Auftrag von Joshua Wells > Gesendet: Freitag, 10. Juli 2015 13:43 > An: mems-talk@memsnet.org > Betreff: [mems-talk] Liftoff Process Using LOR 10B and 1800 Series Resist > > I am trying to develop a repeatable liftoff process using LOR10B and an > 1800 series positive resist for use with 1:1 microdev developer (necessary > for material compatibility). The trouble arises in the repeatability of the > process. Time of development varies significantly between runs with no > process parameters changing yielding far too much undercut for our > application. We have the LOR thinner and have by trying to work with that > as > well as full thickness LOR. > > Does anyone have a repeatable process or suggestions? > > > Joshua > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > > _______________________________________________ > Hosted by the MEMS and Nanotechnology Exchange, the country's leading > provider of MEMS and Nanotechnology design and fabrication services. > Visit us at http://www.mems-exchange.org > > Want to advertise to this community? See http://www.memsnet.org > > To unsubscribe: > http://mail.mems-exchange.org/mailman/listinfo/mems-talk > _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk