suitable etchant for titanium thin layer on silicon substrate
Morrison, Richard H., Jr.
2016-06-02
Transene in Massachusetts sells a Ti etch for use with resist. I use it all the
time.
Rick
Draper
Principal Member of the Technical Staff
555 Technology Square
Cambridge Ma, 02139-3563
www.draper.com
rmorrison@draper.com
W 617-258-3420
C 508-930-3461
From: mems-talk-bounces+rmorrison=draper.com@memsnet.org [mailto:mems-talk-
bounces+rmorrison=draper.com@memsnet.org] On Behalf Of KarthiKeyan K
Sent: Sunday, May 29, 2016 9:20 AM
To: General MEMS discussion
Subject: [mems-talk] suitable etchant for titanium thin layer on silicon
substrate
Dear Friends,
Kindly suggest suitable etchant for titanium thin layer on silicon substrate.
(PPR mask pattern over the titanium thin layer)
Looking forward to you reply.
--
Thanks & Best Regards,
KarthiKeyan K
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