durusmail: mems-talk: How to make a metal grid
How to make a metal grid
2016-07-05
John Bohland
2016-07-06
Bill Moffat
2016-07-06
Bill Moffat
2016-07-06
Gary Hillman
2016-07-06
shay@mizur.com
2016-07-07
Philipp Altpeter
2016-07-07
Wilson, Thomas
2016-07-07
Andrew Sarangan
2016-07-12
Daniel Figura
2016-07-12
Roberto Igal Chertkow
2016-07-13
John Bohland
How to make a metal grid
shay@mizur.com
2016-07-06
Al Dry etch or if you dont have it, lift -off maybe

----- Original Message -----
From: John Bohland 
Date: Wednesday, July 6, 2016 1:19
Subject: [mems-talk] How to make a metal grid
To: "mems-talk@memsnet.org" 

> I am interested in making a metal grid on a 370 mm X 470 mm
> glass substrate.
>
> The problem is that the metallization lines must be only 1.5
> microns in width and spaced (pitch) only a few microns apart.
>
> The metal can be Al or Ag and 100 nm thick.
>
> The best idea I have is to monolithically coat the glass with
> sputtered (PVD) Al or Ag then use a picoseond laser to remove
> all but the desired 1.5 micron wide metal line widths. Even then
> I don't know if the laser would have good enough resolution to
> meet these requirements.
>
> Anyone have better ideas?
>
> Thanks,
>
> John
>
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