Hi Ashok, There are a few possible approaches here. The first is to slow the etch rate of your Bosch process to realise small scallops and possibly use shorter deposition and etch steps. Should still offer respectable rate and selectivity. The second is to run in a non-switching process. Typically this uses a gas ratio of SF6:C4F8 in the region 1:2 to 1:3 with a moderate ICP power. Adjust the RIE (bias) power to get a vertical profile. The drawback of this process is that for a vertical etch the rate is lower than the Bosch process and the selectivity to mask is typically low - meaning an excessively thick mask is required for through wafer etching. It is quite a heavily depositing process and so you will also need to increase your cleaning frequency. It is possible to run in a regime to obtain sloped or partially-isotropic etch at higher rates and selectivity but this will typically increase sidewall roughness significantly above your target. The third is to run an SF6:O2 non-switching process which will give a slightly higher etch rate than SF6:C4F8 but at room temperature will typically undercut excessively on deep etches and not have as vertical a sidewall. Running at cryogenic temperatures (search "black silicon method" and "Twente") to improve this is not an option on your system. Regards, Mark McNie -----Original Message----- From: Ashok . [mailto:ashok@sitarindia.com] Sent: 03 May 2017 08:46 To: mems-talk@memsnet.org Subject: -|EXT|- [mems-talk] Through Silicon Via using Non-Bosch recipe Dear mems-talk community, I am using SPTS(Orbotech) DRIE ICP etcher for etching TSV but using Bosch process. since my device process' requirements are with scallops < 20nm, I am looking for a recipe (non-bosch) which uses both Etch and Depo steps simultaneously. Could you please guide me in this about the possibility of developing the same? Thanks in advance, Regards, Ashok Kumar D, _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk +++Scanned for Viruses by ForcePoint+++ ___________________________________________________________________________This e-mail is confidential and is for the addressee only. Please refer to www.oxinst.com/email-statement for regulatory information. _______________________________________________ Hosted by the MEMS and Nanotechnology Exchange, the country's leading provider of MEMS and Nanotechnology design and fabrication services. Visit us at http://www.mems-exchange.org Want to advertise to this community? See http://www.memsnet.org To unsubscribe: http://mail.mems-exchange.org/mailman/listinfo/mems-talk