durusmail: mems-talk: Tungsten oxidation
Tungsten oxidation
Tungsten oxidation
Christine Alepee
1999-07-19
Hello all,

Does anyone know at what temperature tungsten (W) begins to oxidize (in air
atmosphere) or where I can find this information?
What about the chemical stability of tungsten?
Can tungsten be deposited as a thin film on Si or Si nitride (by evaporation,
sputtering,...) ?
If yes, is an adhesion layer needed?

Any information about these questions will be highly appreciated.

Thanks in advance,

Christine Alépée


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