durusmail: mems-talk: Selective Tungsten on Aluminum
Selective Tungsten on Aluminum
1999-07-29
Selective Tungsten on Aluminum
Milam Pender
1999-07-29
Can tungsten be selectivity deposited on aluminum? Is the process
temperature low enough (<400C)? Will the process gases (WF6) etch silicon
nitride during the deposition? What other considerations are important? Is
there a place where we can do this process on individual die?

Please send responses to mpender@thermotrex.com. Thanks


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