Generally, such parameters for materials are measured using a technique
called TGA (thermo-gravimetric analysis), in which the sample is heated
slowly in a precisely controlled manner, and changes in its mass, as a
function of temperature are recorded. Such a graph allows the experimenter
to determine all the phase changes which occur during the heating cycle
graphically. TGA instruments are commercially available, and most good
polymer research labs would certainly have such an instrument.

                                                        Sincerely Yours,

                                                        Karl Cazzini (Ph.D)

-----Original Message-----
From: mems-mgr@ISI.EDU [mailto:mems-mgr@ISI.EDU]On Behalf Of Foo Chin
Peng
Sent: Tuesday, December 01, 1998 8:16 PM
To: MEMS@ISI.EDU
Subject: Glass transition measurement procedure


Hello

I would like to know the procedure which is used for measuring the glass
transition temperature (Tg) of photoresist and polyimide? Such Tg values are
normally reported in product brochure.

Perhaps any photoresist or polyimide producers could help me.

thank you
foo chin peng
e-mail : mcpfoo@ntu.edu.sg
Nanyang Technoplogical University