William L Benard wrote:
>
> Hello,
>
> Does anyone know of commercial vendor for CO2 release/supercritical
> release systems?
>
> Thank-you,
>
> Regards
> William Benard
>
Hi,

if you mean supercritical drying to avoid microstructures sticking,
there is a company

Bal-tec AG
PO Box 62
FL-9496 Balzers
Principality of Liechtenstein
tel ++41 75 388 12 12
fax ++41 75 388 12 60

that sells a CO2 apparatus with a small chamber, originally designed
to dry biological samples for electron microscopy.
They develop one for wafers, too. Tell them my best greetings


Best regards


Gerhard




>

--
Gerhard Lammel
Institut de microsystemes
Ecole Polytechnique Federale de Lausanne (EPFL)
CH-1015 Lausanne, Switzerland
tel: ++41 (0)21 693 65 73
fax: ++41 (0)21 693 59 50
email: Gerhard.Lammel@epfl.ch