durusmail: mems-talk: Carbon Etchant?
Carbon Etchant?
1999-10-07
Carbon Etchant?
nigel r. sharma
1999-10-07
Does anyone know of methods and liquids for etching carbon (soot
particles)?  I have soot particles deposited onto silicon or Pyrex
substrates and I need an etchant that will dissolve the soot without
attacking either substrate.  I've tried a number of etchants listed for
carbon in the CRC Handbook of Metal Etchants without luck.  The only
removal effect I get, in some cases, is liftoff from the substrate
surface.

I'll compile a list of answers and post it back to this discussion group.
Thanks for your help.

Nigel Sharma.
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email: sharma@u.washington.edu
voice: 206-685-6878
web site: http://lettuce.me.washington.edu/micropump/
MicroFluidics Laboratory
University of Washington, Seattle, USA.
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