durusmail: mems-talk: SU-8 photoresist
SU-8 photoresist
1999-10-08
SU-8 photoresist
Tiziana Lepidi
1999-10-08
i have problems with SU-8 photoresist. in particular i don't have idea
to spin the photoresist on the silicon subtrate without form bubbles. Do
you Know how to apply this photoresist avoiding this problem and have a
uniform layer of photoresist?
Thanks Vanessa la Cecilia
Dr. Vanessa la Cecilia
e-mail: vanessa.lacecilia@aquila.infn.it  or alaceci@tin.it
tel. +393388424257


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