durusmail: mems-talk: To clean out side wall polymers on PZT.
To clean out side wall polymers on PZT.
1999-10-14
To clean out side wall polymers on PZT.
Yong-keun Yim
1999-10-14
I am searching for etchants to clean out side wall polymers on PZT. It
formed a very thin amorphous state apeared in the TEM image. I thought
it would be a polymer formed during the etching processes. Could you
recommend me such etchants without damaging it? Please mail to me about
this or reply here.


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