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Dan:

Have you thought about using direct patterning using Focused Ion Beam
Technology. It is an ideal tool to generate mask with feature dimensions of
400nm or as small as 20nm using this technology. Also controlling the wall
profile is another added advantage of using this technique. We at Norsam
Technology do provideion implantation and FIB services and if you can send me
more details we can help you out on this project. Please visit our website for
more details http://www.norsam.com.
Thanks

Jayant
*************************************
Jayant Neogi
Vice President & CTO
Norsam Technologies Inc.
Ph# (503) 640-0586
Fax  (503) 640-8117
http://www.norsam.com
*************************************

dan.w.chilcott@delphiauto.com wrote:

> I am looking for a way of making 300 nm deep pyramid shaped pits in either
> silicon or quartz.  The method does not need to be compatible with large
> volume production.  I am interested in the angle and surface texture of the
> pit.
>
> I know that I can use anisotropic etching of 100 silicon to form such pits
> but I am photolithography limited.  A 300 nm deep pit would require about a
> 400 nm sized opening in a mask or a subsequent deposition to narrow the
> opening which would round the features.  Does anybody have experience with
> depositing a film to reduce the size of an etch pit?  Can a sharp pyramid
> feature by preserved?
>
> I am interested in a foundry that could make the 400 nm sized mask
> openings,  or another method of machining 300 nm deep pyramid shaped pits
> in silicon or quartz.
>
> Dan Chilcott
> Delphi Delco
> Advanced Sensor Development
> 765-451-7467
>
>



--------------498668BBE305BA7ED6D5DC2C
Content-Type: text/x-vcard; charset=us-ascii; name="vcard.vcf"
Content-Transfer-Encoding: 7bit
Content-Description: Card for Jayant Neogi
Content-Disposition: attachment; filename="vcard.vcf"

begin:          vcard
fn:             Jayant Neogi
n:              Neogi;Jayant
org:            Norsam Technologies
email;internet: jneogi@norsam.com
title:          Vice President & CTO
tel;work:       (503) 640 0586
tel;fax:        (503) 640 8117
x-mozilla-cpt:  ;0
x-mozilla-html: FALSE
version:        2.1
end:            vcard


--------------498668BBE305BA7ED6D5DC2C--