durusmail: mems-talk: Planar Gratings
Planar Gratings
1999-10-18
Planar Gratings
Regina Grote
1999-10-18
Dear collegues,

I am working in the field of integrated planar waveguide optics in
polymers. For a new project I am thinking of integrating blazed
gratings with a grating period of 500 nm to 1.5 µm (sawtooth
shaped etching edge) in the planar waveguide.
I got  now 2 questions
1) can anyone help me out with references and or experiences
concerning planar waveguide gratings?
2) has anyone experience in photolithographically  (PR AZ5214?)
structuring 1.5µm sawtooths (or sth. comparable) on for example
polymers?

Thank you very much in advance!
Yours Regina Grote
________________________________________________________________________

Dipl.-Ing. Regina Grote                  e-mail:grote@physik.uni-kl.de,

AG Integrierte Optoelektronik            tel:   +49-(0)631-205-4149
Universitaet Kaiserslautern              fax:   +49-(0)631-205-4147

Erwin-Schroedinger-Str 46, 67653 Kaiserslautern, Germany


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