durusmail: mems-talk: Deposition of Thick Metals
Deposition of Thick Metals
Deposition of Thick Metals
Andrew Carl Miner
1999-10-27
I am needing information on a method to deposit 100um of Au or Cu in
features of about 500um x 500um.  Would electroplating be the best
option? If so, I would need information on where to buy plating
solutions and where to get the procedure to do such plating.
Thanks
Andrew Miner
MTL
Mechanical Engineering
U.C. Berkeley


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