Hi! You can look for parameter of friction from our MEMS Website about materials perfermence. Fu Yongqi Research Fellow Precision Engineering Lab. School of Mechanical & Production Engineering NANYANG TECHNOLOGICAL UNIVERSITY NANYANG AVENUE SINGAPORE 639798 23/12/1998 > -----Original Message----- > From: Shivalik Bakshi [SMTP:sbakshi@cs.sfu.ca] > Sent: Tuesday, December 15, 1998 7:02 AM > To: MEMS@ISI.EDU > Subject: friction > > Dear MEMS Researchers, > > I need some approximate value for the sliding friction force between two > polysilicon plates (100um by 500 um) Any reasonable approximation or > reference would be much appreciated. > > Thanks, > Shivalik >