durusmail: mems-talk: request
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request
WU YIU BUN 98684153
1999-11-16
Hi,
        I am an undergraduate student in Hong Kong. I am doing a research
on laser micromachining. Would you mind to answer some questions for me
please? Thanks.
1. What is the minimum feature size that can be produced by laser
micromachining in IC fabrication?
2. How "micro" do you expect laser micromachining can do in the future?
3. How costly is laser micromachining compared with other micromachining
process?
Thanks a lot


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