I do not recall the numbers, however I can suggest the references you could
check for recent experiments
by Micheal Gardos:
M. N. Gardos (1996) Trib. Lett. Volume 2, pages 173-187, Surface chemistry-
controlled tribological behavior of Si and diamond.
M.N. Gardos, Tribol. Lett. 2 (1996) 355.

Shivalik Bakshi wrote:

> Dear MEMS Researchers,
>
> I need some approximate value for the sliding friction force between two
polysilicon plates (100um by 500 um) Any reasonable approximation or reference
would be much appreciated.
>
> Thanks,
> Shivalik
>

--
 Dr. Tahir Cagin   | http://www.wag.caltech.edu/home-pages/tahir/
 Dir. Materials Science and Technology
 Materials and Process Simulation Center |   Phone : (626) 395-2728
 California Institute of Technology      |   FAX   : (626) 585-0918
 Pasadena, CA 91125, U.S.A.        |  e-mail: tahir@wag.caltech.edu