Dear all:

we have a serious problem with thin film passivation of our chips.  All
we've tried so far fails when submerged in 100 mM KCl.  That includes
sputtered and PECVD SiO2 and PECVD SiN.  We can not use LPCVD, because
one of the requirements is transparency, so we use glass substrates.

Could you please suggest a place with confirmed capability to deposit
thin (no more than 4,000 Angstrom) insulation which survives submersion
in aqueous saline?  In particular, we know from literature that PECVD
SiN, if deposited right, should work.  Who can do it for us?

Thank you.

Alex Shenderov, Ph.D.
President
Nanolytics Co.
(919) 233-3485