Hello,

I am trying to etch grooves with 30 micron depth on quartz wafer (4" in
diameter) using 48% HF, I can't get smoonth grooves after etching, there
are some bubbles in the grooves even I add agitation condition. Does any
one know how to solve this problem (BOE does not work because of smaller
etching rate). Thank you in advance.


Weijie Wang
wwangc@sfu.ca