durusmail: mems-talk: Circular membranes
Circular membranes
1999-01-12
Circular membranes
Phil Rayner
1999-01-12
Hello,
I'm looking for a method to produce circular membranes etched
from Si. The membrane itself can be made of any material eg
Si3N4 or SiO2 or Si itself. Can anyone help?

Thanking you in advance

Phil Rayner


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