Perry,

A. V. Korlyakov and V. V. Luchinin recently wrote a paper entitled "Silicon
Carbide Microheaters."  They demonstrated a surface temperature of 1000
degrees C on their die.  Check with IEEE for paper 0-7803-4540-1/98/$10.00.

Harold Snyder
MEMS, Hybrid & MCM & High Temperature Consultant


Begin Included Message:
============================================
> Subj:  Micromachined heaters and heat exchangers
>  Date:        1/5/99 9:36:14 PM Central Standard Time
>  From:        pskeath@spraychip.com (Perry Skeath)
>  Reply-to:    pskeath@spraychip.com (Perry Skeath), mems-cc@ISI.EDU
>  To:  MEMS@ISI.EDU
>
>  Hello, MEMS-list subscribers -
>
>  We are interested in heating a liquid as it passes through a chip.  Does
>  anyone have literature references on either of the two following subjects
>  that they would be willing to share:
>
>  1.  Chip-heater resistors
>
>  2.  Micromachined heat exchangers
>
>  Thank you in advance for your help!
>
>  Perry Skeath
>  SprayChip Systems Corp.
>  9841 Greenbelt Road, Suite 101
>  Seabrook MD 20706-6270
>  (301) 552-5570 voice
>  (301) 552-5573 fax
>
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End Included Message.