Jason,

  IS this photoresist designed for these thicknesses and is it a new
photoresist (ie new product) ? I ask because I had similar problems with
Shipley STR 1110. It turns out the problem was that the resist just
didn't work, but Shipley couldn't improve it because they made a thick
resist for IBM that worked (and there was some kind of deal that only
IBM could get the stuff).

Luckly for MEMS people, IBM got out of the thin film head business and
let Shipley sell the product that IBM got. Its the SJR 5700 series (I
used the SJR 5470 product-- 15 um thick). It works very well and I liked
it alot. MCC is the distributor for small quantities of Shipley product.

    Ken Westra
    Manager/Staff Scientist
    MicroFab at the University of Alberta