Hi,

Depending on the thickness you want, you may like to use the device layer of
SOI wafers.

Mike Rosa.


At 16:05 12/01/99 -0000, you wrote:
>Hello,
>I'm looking for a method to produce circular membranes etched
>from Si. The membrane itself can be made of any material eg
>Si3N4 or SiO2 or Si itself. Can anyone help?
>
>Thanking you in advance
>
>Phil Rayner
>
>
>