Dear colleague,

 I am using Mitutoyo Digital Indicator with Stand. So, first, I measure
the wafer thickness then I obtain film thickness after measuring total
thickness.

 The system measures 0~2mm with 0.001mm resolution and 0.003mm
accuracy. It consist of ID-C Digimatic Indicator (Part # 543-250) and Dial
Gage Stands (7002). The price of the system is about 500 US$.

 I hope this will help you...

At 01:20 PM 99-01-14 -0600, Ramadas, Padmaja wrote:
>I am looking for equipments that can measure thick resist more than 30 um
upto 100um or more on silicon wafers. I would appreciate any directions I
can have on it.
>
>Thank you,
>
>Regards,
>
>Padmaja
>
>
>
>
>

Jun-Bo Yoon

Ph.D. student
Dept. of Electrical Engineering, KAIST
373-1 Kusong-dong, Yusong-gu,
Taejon 305-701, Korea
Tel: +82-42-869-8524
Fax: +82-42-869-8530
Email: jbyoon@eeinfo.kaist.ac.kr
WWW: http://mirine.kaist.ac.kr