Use an alpha-step...most facilities have one!

Trevor Niblock;
MEMS group, Rm. 2043, Building 53, ECS, Southampton University,
Highfield, Southampton, SO17 1BJ, UK.
e-mail: t.niblock@soton.ac.uk
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-----Original Message-----
From:   Ramadas, Padmaja [SMTP:ramadas@ti.com]
Sent:   14 January 1999 19:21
To:     MEMS@ISI.EDU
Subject:        Equipment for measuring thick polymers

I am looking for equipments that can measure thick resist more than 30 um
upto 100um or more on silicon wafers. I would appreciate any directions I
can have on it.

Thank you,

Regards,

Padmaja