>I'm interested in getting holes etched in 7740 pyrex glass.With Cr=20

>deposition using magnetron sputtering, I find that Cr film lifts off=20

>after one or one and half hour of etching in 1:1 HF.


I suggest you to look at the following papers:


Thierry Corman, Peter Enoksson and G=F6ran Stemme, "Deep wet
etching of borosilicate glass using an anodically bonded silicon
substrate as mask", Journal of Micromechanics and Microengineering 8
(1998) 84-87.


Shuichi Shoji, Hiroto Kikuchi and Hirotaka Torigoe, "Low-temperature
anodic bonding using lithium aluminosilicate-B-quartz glass ceramics",
Sensors and Actuators A 64 (1998) 95-100.


As described in these papers and as you experienced, it is difficult to
etch deep in pyrex glass. A practical solution is to use SD-2 glass
instead of pyrex, which etches faster than pyrex with less
underetching: with a conventional Chromium+gold+resist mask, it is
possible to etch through the SD-2 glass.


Regards,

Thierry




From ""Owen Haw" owen.haw"@sympatico.ca Wed Jan 13 01:50:26 1999
To: mems@isi.edu
Subject:   biofilm
From:   Owen Haw <"\"Owen Haw\" owen.haw"@sympatico.ca>
Date: Wed Jan 13 01:50:26 1999
Lines: 4

What is the difference between biocarrirs and biofilm?

Thank-you
Danielle