Phil Rayner wrote:

> Hello,
> I'm looking for a method to produce circular membranes etched
> from Si. The membrane itself can be made of any material eg
> Si3N4 or SiO2 or Si itself. Can anyone help?
>
> Thanking you in advance
>
> Phil Rayner
>

See in P.-A. Clerc et al., J.Micromech.Microeng. 8 (1998) 272-278
or contact Ph. Luginbuhl at IMT, University of Neuchatel,
Switzerland ().

Pierre