Platinum has been used in some fabs for the past
30 years.  Lucent still manufacturers analog ICs with
Ti/Pt/Au metallization with Pt silicide and Pt
Schottky barrier diodes.

R.B. Fair
Professor



At 03:34 PM 1/20/99 -0500, you wrote:
>I am looking for information about the use of Platinum in a fab.  Is
>anybody currently using Platinum in their fab?  If so,  what precautions
>are taken to eliminate contamination issues.  We have a running debate
>about the potential danger of contamination from Platinum and we could use
>some industry advice.
>
>Dan Chilcott
>MEMS Development
>Delphi Delco Automotive Systems
>
>
>