Hello,
        You have'nt mentioned whether the wafer below the resist, is plain
silicon or is there another layer of transperent film below ( like SiO2
Si3N4, ..), if there is no transperant film below the resist, then

Ellipsometry would give a fairly accurate estimate ( of the order of
1 micron) of thickness.
we use a Rudolf series-I ellipsometer and effectively measure resist
thickness of that order. ( the refractive index of the particular resist
are specified by the manafacturer ( Merk, Olin Hunt, JT Baker) and are
well classified even according to postbake temp. / prebake temp/exposing
wavelength.

If you have any other layer below then it would be better to hardbake the
resist and then use a
DecTak Mark III profilometer, this though is a destructive testing it
would work the best for two-three scans.

regards
Amit Shiwalkar



On Thu, 14 Jan 1999, Ramadas, Padmaja wrote:

> I am looking for equipments that can measure thick resist more than 30 um upto
100um or more on silicon wafers. I would appreciate any directions I can have on
it.
>
> Thank you,
>
> Regards,
>
> Padmaja
>
>
>
>

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Amit Shiwalkar                         Dept. Of Bio-Medical Engineering.
3,Vasant,                              IIT Bombay.
Carter Road,                           Powai, Bombay-400076
Khar,
Bombay(Mumbai)-400052
INDIA.


                     Email: amits@cc.iitb.ernet.in

" Reality Is a Figment of IMAGINATION "
                                ----------- Amit Shiwalkar

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