You may contact:
Mr. Dan Harding (phone 217-333-0935)
Print shop
University od IL

they can make mask film for you at 15 micro resolution.
a sheet(paper size) is $13.
you can send the file to them through internet.

Goog luck
***********************************************************************
Ji   Fang                               P.O.Box   10137
Senior Research Engineer                Institute for Micromanufacturing
Phone:  318-257-5111                    Louisiana  Tech  University
Fax:    318-257-5104                    Ruston   LA,  71272
Email:  jfang@engr.latech.edu
***********************************************************************