durusmail: mems-talk: control of electrostatic actuators
control of electrostatic actuators
1999-02-10
control of electrostatic actuators
Andreas Ehrlich
1999-02-10
Dear Colleagues
starting my work on MEMS I would appreciate if anybody can send
me some information about control of electrostatic driven actuators
in the instable regime. Especially I am interested in control
mechanisms to keep the actuator output linear at great deflection
angles. Any information about latest breakthroughs would be highly
appreciated. Thanks in advance

Andreas

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Dr. Andreas Ehrlich
Erwin Sick Engineering GmbH
Bergener Ring 43
D-01458 Ottendorf-Okrilla
GERMANY
Phone: (+49) 35205/524-42
Fax:   (+49) 35205/524-22
Email: ehrlicha@engineering.sick.de
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