Did you try PMMA??

-----Original Message-----
From: Sanjay Dhar [mailto:Sanjay.Dhar@readrite.com]
Sent: Friday, February 12, 1999 6:54 PM
To: MEMS@ISI.EDU
Subject: FW: Thick Resists for Au plating


AZ 4620 is regularly used for Cu and Au plating in 25 micron application.
> ----------
> From:         Todd Green[SMTP:todd_green@ioc.co.uk]
> Reply To:     Todd Green;mems-cc@ISI.EDU
> Sent:         Tuesday, February 09, 1999 10:35 AM
> To:   MEMS@ISI.EDU
> Subject:      Thick Resists for Au plating
>
> Hi,
>
> I'm looking for resists that can be spun up to around 25 microns and have
> good compatability with alkaline (pH=10) gold sulfite plating bath. We are
> using SJR 3740 but are interested in other alternatives. We tried SU-8
> but can't find anything to remove it. Is there anything else available?
>
> Thanks,
>
> Todd Green
>
>
>