durusmail: mems-talk: nano vibrations in MEMS
nano vibrations in MEMS
nano vibrations in MEMS
Dr. Matthias Scherge
1999-02-17
Dear MEMS-Community:
We have measured friction  in the micronewton range as a function
of external vibration. The vibration was introduced perpendicular to
the direction of sliding with an amplitude ranging from 4 nm up to 2
microns.

The results could be very interesting for microtechnology, however,
we are struggling with the theoretical description.
Is anybody aware of publications or running projects in that field?
Any help is appreciated.
Best Regards,

  Matt Scherge

Dr. Matthias Scherge
Microtribology Group
Technische Universitaet Ilmenau
PF 100565
D-98684 Ilmenau
Tel +49 3677 693782
Fax +49 3677 693771
ttp://imath.mathematik.tu-ilmenau.de/phys/personal/tribo.html


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