I am searching data on how to design variable capacitance
using MEMS technology for high frequency circuits.

what can be achieved with MEMS technology in terms of
linearity, Q factor, operating frequencies, capacitance ratio ...
for variable capacitance ?

Please, can you bring me some help.
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Samuel ROUSSELIN
RF Engineer
Mobile Multimedia dept
CANON Research Centre France S.A.
Rue de la Touche Lambert
35517 CESSON-SEVIGNE Cedex - FRANCE

Phone : + 33 (0) 2 99 87 96 26
Fax : + 33 (0) 2 99 84 11 30
E-mail : rousselin@crf.canon.fr
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