You might try Virginia Semiconductor for the wafers, I don't
remember their phone number but they are located in Fredericksburg
VA.  Regarding the nitride deposition, take a look at the
following URL:

http://www.mems-exchange.org

The MEMS Exchange can do various MEMS fabrication processes
at a relatively low cost.


>Does anyone know some vendors for Si(110) 3inch or 4inch (or 2 inch) at
>low price?  And also nitride deposition for the Si wafers.
>
>Thanks,
>
>
>============================================
>Kiyotaka Mori (Graduate Student)
>
>Dept.of Materials and Nuclear Engineering,
>BLDG.090,
>University of Maryland at College Park,
>College Park, MD 20742
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>Fax: 301-314-9467
>E-mail: mori@eng.umd.edu
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>